Product Specification
| Tube voltage | 20 ～ 70kV |
|---|---|
| Tube current | 0 ～ 200μA |
| Focal dimensions | 10μm |
| X-ray exposure angle | 11° |
| Distance from X-ray focus to radiation window | 35mm |
| External dimensions W x D x H | 433×160×140 mm |
| Power source | AC100V 50W or less |
※A wide range of other X-ray sources can be proposed. Please contact our sales team for more information.
Microfocus X-ray Source Applications
| Tube voltage | Tube current | Maximum output | Focal dimensions |
|---|---|---|---|
| 60kV | 800μA | 48W | 100μm |
| 90kV | 200μA | 8W | 5μm |
| 100kV | 500μA | 50W | 100μm |
| 130kV | 300μA | 39W | 5μm |
| 150kV | 500μA | 75W | 5μm |
Forte
The key words for the development are ‘soft X-ray’, ‘high resolution’ and ‘high brightness’.
The X-ray business started as the ‘Soft X-ray Project Team’ at the predecessor company, TOHKEN Co. Soft X-ray has two meanings: it is a microfocus X-ray source and it is literally soft X-ray, i.e. long-wavelength X-ray. We have established ourselves as a unique manufacturer in the world by continuing development on how to make long-wave X-rays brighter and how to increase the small amount of X-rays coming out of the microfocus. The performance of X-ray systems is determined by the X-ray source and detector, and there are limits to what image processing can do to improve the image.
We are exploring new possibilities in X-ray inspection with the keywords ‘soft X-ray’, ‘high resolution’ and ‘high brightness’.
JIMA microcharts with 0.4 µm resolution!
X-ray focus size 0.25 µm, resolution guaranteed at 0.4 µm according to the JIMA chart of the Japan Inspection Instruments Manufacturers Association.
A high-brightness, high-resolution open-tube X-ray source with a high-precision electron optical system with a two-stage reduction lens and aberration correction, and a high-current density filament (LaB6) as the electron source.
Resolution switch function
No filament change, so resolution can be changed instantly without vacuum leakage
The resolution can be instantly changed to suit the object being observed.
High resolution size（0.4um/0.6um）
When you need sharp images of microcracks, voids and fibrous material down to a few microns at 1000x or more.
Void less than 1um in TSV
Chip capacitor size 0402
Medium resolution size（1um/2um/3um）
For large objects larger than 100um.
The high X-ray dose is advantageous for CT and moving image imaging when luminance is preferred to high resolution.
※TX-300 is (1um/3um)
Gold wire connections and aluminium pads
Flip Chip Bump Junction
Easy maintenance
The filaments are cartridge type and can be replaced by the customer.
Adjustment after replacement is performed automatically by the supplied software.