Features and performance
High Resolution
- Equipped with the world’s highest resolution X-ray source (JIMA chart 0.4 µm guaranteed).
- Spatial resolution of less than 100 nm
- High-precision rotary specimen stage
High Contrast
- High brightness and resolution achieved by using LaB₆ filaments.
- Equipped with a high sensitivity detector, ideal for observing light element materials such as resin and carbon.
High speed imaging
・Equipped with a non-stop imaging function that significantly reduces imaging time compared to conventional models (*compared to our conventional models).
Target sectors/products
Use
| Field | Object to be inspected | Inspection details |
|---|---|---|
| Materials and Chemistry | GFRP CFRP Carbon Adhesives Resin films Battery materials (active materials, binders) Cellulose nanofibres (CNF) Paper | Fibre orientation Filling rate Voids Voids Pores Film thickness Cohesion Dispersion Structure Exfoliation |
| Electronic parts (components) | Chip Components Micro Connectors MEMS Small Sensors | Joining Void Void Void Disconnection Peeling Structure Cracks |
| Semiconductor | TSV Interposer Microbumps | Connection Void Fill factor Voids Voids Film thickness Cracks |
| medical care | Tablets Capsules Non-woven | Joining Void Film thickness Structure |
| Biology | Insects Bones Seeds Flowers Leaves | Structure |
For enquiries about this product or to discuss its implementation, please click here.
Imaging Sample
Adhesive cohesive dispersion with glass filler.
(glass filler several µm to several tens of µm)
Resin agglomerated dispersion with cellulose nanofibres.
(Minimum fibre diameter 0.8 µm)
CFRP orientation created by a 3D printer.
(fibre diameter 7 µm) Sample provided by the Japan Aerospace Exploration Agency (JAXA).
1005 Size of electronic components
structural observation
Product Specification
| Radiation source | Proprietary high-resolution X-ray source |
|---|---|
| Tube voltage | 20kV～100kV |
| Tube current | 10～200μA |
| filament | High brightness LaB6 chip |
| Highest resolution | 0.4 µm (JIMA chart) |
| Spatial resolution | 100 nm or less |
| Detector | High sensitivity x-ray detector (16-bit) |
| Maximum field of view | 17 × 17 mm |