

X-ray inspection system



MTS contributes to society with its unique X-ray inspection technology.
X-ray inspection systems enable the observation of high-density semiconductors, minute electronic components, resin materials and composite materials. As a manufacturer of inspection systems equipped with a proprietary X-ray source with the world’s highest resolution, we contribute to society through non-destructive testing in the fields of research and development, production sites for automotive parts and batteries, and quality control.

Automated X-ray inspection with extensive experience and track record
With the number one market share in lithium-ion battery production lines, we propose combinations and systems to meet customer needs, linking inspection images and results with traceability to reduce work processes and improve product quality.

High-resolution, low-voltage X-ray source enables unconventional analytical analysis
Our own low voltage, high intensity X-ray sources are highly regarded not only in the field of conventional semiconductors and electronic components, but also in the field of new materials and composites that are easily penetrated by X-rays, and are used by major manufacturers as well as universities and research institutes.

Proprietary X-ray source with the world’s highest resolution
Our proprietary X-ray sources have always led the industry in resolution, with a guaranteed resolution of 0.4μm based on microcharts. We are also developing an X-ray source with a resolution of 0.1μm, the most advanced in the world.
Case Studies

Horizontal irradiation type automatic X-ray inspection system for cylindrical workpieces
Lithium-ion battery winding misalignment, temperature sensor element to tube distance, etc.

Automatic wafer bump void inspection system
Automatic inspection of voids down to a few microns.

Automatic line sensor inspection system for laminated batteries and large sheets.
Foreign objects inside the battery, misaligned plates, etc.
Transmission and CT imaging case studies

CNF-containing resins
The agglomeration and dispersion of resin containing cellulose nanofibres.(minimum fibre diameter 0.8 µm)

3D printed CFRP.
(fibre diameter 7 µm) Sample provided by Japan Aerospace Exploration Agency (JAXA)
